Citation:D.P. Hoogerheide, H. B. George, J.A. Golovchenko, and M. J. Aziz. 2011. “Thermal Activation and Saturation of Ion Beam Sculpting.” J. Appl. Phys., 109, 074312.Download CitationBibTex Tagged XML Download mja207.pdf300 KB Last updated on 02/20/2022