@article {1309711,
	title = {High level active n+ doping of strained germanium through co-implantation and nanosecond pulsed laser melting},
	journal = {Journal of Applied Physics},
	volume = {123},
	number = {165101},
	year = {2018},
	pages = {1-6},
	url = {https://aip.scitation.org/doi/pdf/10.1063/1.5012512},
	author = {David Pastor and Hemi H. Gandhi and Corentin P. Monmeyran and Akey, Austin J. and Ruggero Milazzo and Yan Cai and Enrico Napolitani and Russell M. Gwilliam and Iain F. Crowe and Jurgen Michel and L. C. Kimerling and Anuradha Agarwal and Mazur, Eric and Michael J. Aziz}
}
