@article {318356,
	title = {Stress evolution in Si during low energy ion bombardment},
	journal = {J. Mater. Res.},
	volume = {29},
	number = {24},
	year = {2015},
	month = {2014},
	pages = {2942-2948},
	author = {Y. Ishii and C.S. Madi and M. J. Aziz and E. Chason}
}
