@article {128741,
	title = {Deactivation of metastable single-crystal silicon hyperdoped with sulfur},
	journal = {J. Appl. Phys.},
	volume = {114},
	year = {2013},
	pages = {243514},
	author = {C.B. Simmons and Akey, A.J. and J.J. Krich and J.T. Sullivan and D. Recht and M. J. Aziz and T. Buonassisi}
}
