@article {78816,
	title = {Controlling dopant profiles in hyperdoped silicon by modifying dopant evaporation rates during pulsed laser melting},
	journal = {Appl. Phys. Lett.},
	volume = {100},
	number = {112112},
	year = {2012},
	author = {D. Recht and J.T. Sullivan and R. Reedy and T. Buonassisi and M. J. Aziz}
}
