@article {86646,
	title = {Thermal Activation and Saturation of Ion Beam Sculpting},
	journal = {J. Appl. Phys.},
	volume = {109},
	number = {074312},
	year = {2011},
	author = {Hoogerheide, D.P. and H. B. George and J.A. Golovchenko and M. J. Aziz}
}
