@article {87551,
	title = {Fundamentals of FIB Nanostructural Processing: Below, At and Above the Surface},
	journal = {MRS Bulletin},
	volume = {32},
	number = {5},
	year = {2007},
	author = {W.J. MoberlyChan and D.P. Adams and M. J. Aziz and G. Hobler and T. Schenkel}
}
