@article {87636,
	title = {Activation volume for phosphorus diffusion in silicon and Si_0.93Ge_0.07},
	journal = {Appl. Phys. Lett.},
	volume = {86},
	number = {141902},
	year = {2005},
	author = {Zhao, Y. and M. J. Aziz and N.R. Zangenberg and A.N. Larsen}
}
