The independence of nanopattern formation and stress evolution during low-energy Ar+ bombardment of Si
Publication information:
Haojin Li, Benli Jiang, Faith Hines, Wei-Jing Chen, Anubhav Wadehra, Walter Mendoza, Aviva Harman, Christina Wan, Derek Qin, Peco Myint, Jiaqi Tang, Joy C. Perkinson, Michael J. Aziz, and Karl F. Ludwig Jr. 2026. “The Independence of Nanopattern Formation and Stress Evolution During Low-Energy Ar+ Bombardment of Si”. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions With Materials and Atoms