Citation:
C.B. Simmons, A.J. Akey, J.J. Krich, J.T. Sullivan, D. Recht, M. J. Aziz, and T. Buonassisi. 2013. “Deactivation of metastable single-crystal silicon hyperdoped with sulfur.” J. Appl. Phys., 114, Pp. 243514.
mja242.pdf | 1000 KB |
mja242.pdf | 1000 KB |