Deactivation of metastable single-crystal silicon hyperdoped with sulfur
Publication information:
C.B. Simmons, A.J. Akey, J.J. Krich, J.T. Sullivan, D. Recht, M. J. Aziz, and T. Buonassisi. 2013. “Deactivation of Metastable Single-Crystal Silicon Hyperdoped With Sulfur”. J. Appl. Phys., 114, Pp. 243514