Effect of layer thickness on device response of silicon heavily supersaturated with sulfur
Publication information:
David Hutchinson, Jay Mathews, Joseph T. Sullivan, Austin J. Akey, Michael J. Aziz, Tonio Buonassisi, Peter D. Persans, and Jeffrey Warrender. 2016. “Effect of Layer Thickness on Device Response of Silicon Heavily Supersaturated With Sulfur”. AIP Advances, 6, 055307