Fundamentals of FIB Nanostructural Processing: Below, At and Above the Surface
Publication information:
W.J. MoberlyChan, D.P. Adams, M. J. Aziz, G. Hobler, and T. Schenkel. 2007. “Fundamentals of FIB Nanostructural Processing: Below, At and Above the Surface”. MRS Bulletin, 32, 5