Ion implantation and annealing of crystalline oxides
Publication information:
C.W. White, P.S. Sklad, L.A. Boatner, G.C. Farlow, C.J. McHargue, B.C. Sales, and M. J. Aziz. 1986. “Ion Implantation and Annealing of Crystalline Oxides”. Mater. Res. Soc. Symp. Proc., 60, Pp. 337-44