Ion implantation and annealing of oxides
Publication information:
C.W. White, L.A. Boatner, P.S. Sklad, C.J. McHargue, S.J. Pennycook, M. J. Aziz, G.C. Farlow, and J. Rankin. 1987. “Ion Implantation and Annealing of Oxides”. Mater. Res. Soc. Symp. Proc., 74, Pp. 357-64