Nanopore fabrication in amorphous Si: viscous flow model and comparison to experiment
Publication information:
H. B. George, Y. Tang, X. Chen, J. Li, J.W. Hutchinson, J.A. Golovchenko, and M. J. Aziz. 2010. “Nanopore Fabrication in Amorphous Si: Viscous Flow Model and Comparison to Experiment”. J. Appl. Phys., 108, 014310