Phase transformation and impurity redistribution during pulsed laser irradiation of amorphous silicon layers

Publication information:

J. Narayan, C.W. White, O.W. Holland, and M. J. Aziz. 1984. “Phase Transformation and Impurity Redistribution During Pulsed Laser Irradiation of Amorphous Silicon Layers”. J. Appl. Phys., 56, Pp. 1821-30