Pressure dependence of arsenic diffusivity in silicon
Publication information:
E. Nygren, M. J. Aziz, D. Turnbull, J.F. Hays, J.M. Poate, D.C. Jacobson, and R. Hull. 1985. “Pressure Dependence of Arsenic Diffusivity in Silicon”. Mater. Res. Soc. Symp. Proc., 36, Pp. 77-82