Pressure dependence of arsenic diffusivity in silicon
Publication information:
E. Nygren, M. J. Aziz, D. Turnbull, J.M. Poate, D.C. Jacobson, and R. Hull. 1985. “Pressure Dependence of Arsenic Diffusivity in Silicon”. Appl. Phys. Lett., 47, Pp. 105-7