Pulsed excimer and CO_2 laser annealing of ion implanted silicon
Publication information:
J. Narayan, R.V. James, O.W. Holland, and M. J. Aziz. 1985. “Pulsed Excimer and CO_2 Laser Annealing of Ion Implanted Silicon”. J. Vac. Sci. Technol. A, 3, Pp. 1836-38