Solute Trapping of Group III, IV and V Elements in Silicon by Aperiodic Stepwise Growth Mechanism
Publication information:
R. Reitano, P. M. Smith, and M. J. Aziz. 1994. “Solute Trapping of Group III, IV and V Elements in Silicon by Aperiodic Stepwise Growth Mechanism”. J. Appl. Phys., 76, Pp. 1518-29