Supersaturating silicon with transition metals by ion implantation and pulsed laser melting
Publication information:
Daniel Recht, M. J. Smith, S. Charnvanichborikarn, J.T. Sullivan, M. T. Winkler, J. Mathews, J. M. Warrender, T. Buonassisi, J. S. Williams, S. Grade\v cak, and M. J. Aziz. 2013. “Supersaturating Silicon With Transition Metals by Ion Implantation and Pulsed Laser Melting”. J. Appl. Phys., 114, Pp. 124903