High level active n+ doping of strained germanium through co-implantation and nanosecond pulsed laser melting

Citation:

David Pastor, Hemi H. Gandhi, Corentin P. Monmeyran, Austin J. Akey, Ruggero Milazzo, Yan Cai, Enrico Napolitani, Russell M. Gwilliam, Iain F. Crowe, Jurgen Michel, L. C. Kimerling, Anuradha Agarwal, Eric Mazur, and Michael J. Aziz. 2018. “High level active n+ doping of strained germanium through co-implantation and nanosecond pulsed laser melting.” Journal of Applied Physics, 123, 165101, Pp. 1-6. Publisher's Version
mja276.pdf750 KB
Last updated on 10/05/2021