Three Dimensional Morphology Evolution of SiO_2 Patterned Films Under MeV Ion Irradiation
Publication information:
K. Otani, X. Chen, J.W. Hutchinson, J.F. Chervinsky, and M. J. Aziz. 2006. “Three Dimensional Morphology Evolution of SiO_2 Patterned Films Under MeV Ion Irradiation”. J. Appl. Phys., 100, 023535